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MEPat UNM
 
 
FACILITIES
 
 
MTTC CLEANROOM - EQUIPMENT

The present set of equipment in the cleanroom includes:

Current tools in the MTTC Cleanroom Manufacturer
Model
   
 
Super critical point dryer Tousimis
Automagasandri 915B
Solvent Bench  
Microscope (4 inch) Nikon
Optiphot
RIE Plasma Etcher March Plasma
CA 1701
Manual Coater Brewer Science
CEE 100
Hotplate Chemat Technoloty
KW-4AH
Sample coater Chemat Technoloty
KW-4A
Microscope (6 inch) with camera and internet connection Nikon
Optiphot 88
Contact Aligner with deep uv mirrors OAI 500
500
Interfermeter Veeco Wyko
VT3300
   
 
Utility Bench (8-foot)  
Particle Counter Cilmet
Acid Bench Santa Clara Plastics
Spin Rinse Dryer (double stack) Verteq
Superclean 1600
Caustic Bench with KOH bath Santa Clara Plastics
Contact Aligner with back side align capability Karl Suss MA6
MA6
   
 
Inspection System Nikon
Optistation 3
RCA Clean Bench Santa Clara Plastics
Spin Rinse Dryer (double stack) Verteq
Superclean 1600
Bell Jar Vacuum Evaporator Veeco
VE 776
   
 
Parylene Coater Specialty Coating System
PDS 2010
DRIE etcher Alcatel
AMS 100

6 Tube Diffusion system
   Oxidation wet and dry Tube
   N-Dope and Drive Tube
   P-Dope and Drive Tube
   CVD Low Temperature
         Oxide Deposition Tube
   CVD PolySilicon Deposition Tube
   CVD Silicon Nitride Deposition Tube

Steed
Mustang
Ellispometer Ruldolph
FE III
   
   
SEM JEOL

A Phase III construction program is anticipated to start in Summer 2007, which will add a six-stack furnace system.