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All users of the MTTC Cleanroom
are expected to pass a written safety exam before they
are granted full access to the facility. This exam is
based upon materials presented in the Cleanroom safety
tutorial. Emergency procedures are also covered in the
safety tutorial and are posted throughout the cleanroom.
The UNM MTTC Cleanroom supports
several microfabrication and MEMS processes, including
photolithography steps (resist spinning, softbake
(hotplate/Blue M oven), contact exposure, bath
developing, spin rinse drying, hardbake), wet
etch (dedicated KOH, SC1, SC2 and HF baths), solvent
/acid cleaning, RIE plasma etch (single wafer),
Deep Reactive Ion Etching (DRIE, Alcatel model
AMS-100-SDE), parylene coating, diffusion processing
(oxidation wet and dry, N-Dope and drive, P-Dope
and drive, CVD silicon nitride deposition, CVD
polysilicon deposition, CVD low temperature oxide
deposition), metal evaporation, E-Beam cure, forming
gas diffusion, metrology (film thickness measurement,
four point probe, interferometer) and SEM.
Users of the cleanroom are expected
to have their process steps checked by cleanroom
staff to make sure the chemicals and gasses are
compatible with those supported by the cleanroom,
and that procedures are within the safety guidelines
of the cleanroom.
For FY-09 (effective 1 Oct 2008),
UNM-based researchers (academic), and federal laboratory
and commercial customers (non-academic), are charged
for use of the MTTC Cleanroom on a monthly billing cycle
per the following schedule:
- There is no fee for use of the cleanroom
for teaching lab sessions directly related to university
and community college courses.
- Out-of-state trainees will be charged
a lab fee of $100 per course or workshop.
- Basic Lab
fee: $33.00/hour academic users; $66.00/hour non-academic
users, capped at $990/month academic users; $1,980/month
non-academic users. The basic lab, primarily,
covers photolithography and metrology tools. There
are additional hourly fees for the DRIE, Parylene
and SEM tools (see below).
- Staff support fee: $37.50/hr academic
users (no cap); $75.00/hr non-academic users (no cap).
- Annual user admin fee: Each individual
user of the cleanroom is charged an admin fee each
fiscal year at $100/yr for academic users and $200/yr
for non-academic users.
- Equipment fee: Selected utility-intensive
equipment will have an additional hourly charge associated
with it, above the Basic Lab Fee. Specifically,
| Equipment-specific
fee structure |
| Item |
Academic Rate |
Non-Academic Rate |
Notes |
| DRIE |
$52.50/hour |
$105/hour |
Requires user certification; no cap |
| Parylene Coater |
$20/hour |
$40/hour |
Requires user certification; no cap |
| SEM |
$20/hour |
$40/hour |
Requires user certification;
no cap |
6-Stack
Furnace |
$40/hour |
$80/hour |
Requires user certification;
no cap |
- Each company is limited to eight
(8) users, at any given time.
- "Junior Faculty" members,
defined as faculty members who have been at UNM for
less than three years, will receive a 50% discount
off of the Academic Rate.
- Junior Faculty will pay no fees
when using students in the cleanroom who are paid
off of internal start-up funds.
- Users will pay for chemicals and
supplies that are not on the standard MTTC supply
list, or exceed the typical consumption rate for normal
MTTC cleanroom use.
- Commercial users of the cleanroom
are expected to sign a Facilities Use Agreement (FUA)
prior to use of the facility. A PDF of this Agreement
is available for consideration.
A Users Guide for the MTTC Cleanroom
is available from the MTTC Cleanroom staff.
Sign-up sheets for the scheduling
of tool use are posted in the MTTC Cleanroom facilities.
Users can schedule up to two months in advance on the
rolling calendar.
Priority of scheduling is:
(1) training for student labs related
to regular university and community college classes,
(2) university research and development,
and
(3) commercial sector use (40% of total
tool-hours capacity, minimum). Computerized (internet)
signup sheets, to replace current paper sheets, are
expected in the future.
The MTTC Cleanroom users have
included: UNM students, CNMCC students, UNM faculty
and student researchers, regional High School faculty
members, Advent Solar, AgilOptics, Emcore, Gratings
Inc., HT Micro Analytical, InterCrossIP, Incitor, K-Tech,
LANL, MEMX, MicroNano, Optomec, Qynergy, Radiant Technologies,
Surfect, and SNL.
The MTTC cleanroom supports the
UNM ECE-574 Microelectronics Processing course (Prof.
Hersee), the UNM ECE-595 MEMS course (Prof. Chen), UNM
ME-561 bioMEMS course (Prof. Lesesman), and the UNM
ChNE-586 Statistics for Design of Experiments in Semiconductor
Manufacturing, as well as MEMS courses at CNMCC. Periodically,
the MTTC cleanroom supports week-long (45 hrs) short
courses in MEMS, for high school faculty and community
college faculty (for information, please contact mep@unm.edu).
A MEMS device, such as a pressure sensor, is produced
during these short courses.
Courses hosted by the MTTC Cleanroom
include,
Spring 2006
- UNM ECE-474/574 Microelectronics
Processing course (Prof. Hersee); created FET. (15
students)
Summer 2006
- The UNM MTTC cleanroom hosted regional
High School faculty members (6) for a hands-on MEMS
training session, to create a MEMS pressure sensor,
from June 5 through June 9, 2006.
Fall 2006
- CNM MEMS-101 Intro to MEMS course
(Instructor: Fabian Lopez), practiced BOE etches on
SiO2-coated wafers. (7 NM students)
Spring 2007
- CNM MEMS-101 Intro to MEMS
course (Instructor: Fabian Lopez), practiced BOE etches
on SiO2-coated wafers. (12 CNM students)
- UNM ECE-474/574 Microelectronics
Processing course (Prof. Hersee); created FET. (20
students)
- UNM ECE-595 MEMS, Transducers,
Devices and Technology (Prof. Chen); created pressure
sensor, and drug delivery probe prototype. (9 students)
Summer 2007
- The MTTC Cleanroom hosted a week-long
MEMS workshop for local high school faculty members,
wherein they created a wafer of pressure sensors (4
faculty from Bernalillo High School, June
2007).
- CNM MEMS-101 Intro to MEMS course
(Instructor: Fabian Lopez); created art wafers, practiced
cleanroom protocols and safety, learned photolithography,
BOE etch, and piranha strip techniques. (9 students)
- CNM MEMS-220 MEMS Fabrication Techniques
course (Instructor: Fabian Lopez); created pressure
sensor arrays, practiced cleanroom protocols and safety,
learned photolithography, plasma dry-etch, metallization
for the "lift-off" process, KOH bulk etch
of silicon, electrical testing, and piranha strip
techniques. (7 students)
Fall 2007
- UNM ME-461E/561E, ECE-519 and NSMS-519
ST Theory, Fabrication, and Characterization of Nano/Microelectromechanical
Systems (NEMS/MEMS) course (Prof. Leseman); created
MEMS pressure sensors and MEMS actuators. (27 students)
- The MTTC Cleanroom hosted a week-long
MEMS workshop for high school faculty members from
Santa Fe and Vermont, and university faculty members
from Iowa, Texas and Mexico, wherein they created
a wafer of pressure sensors (12-16 November 2007)
- CNM MEMS-101 (Sec. 101) Intro to
MEMS course (Instructor: Fabian Lopez), practiced
BOE etches on SiO2-coated wafers. (9 CNM students)
- CNM MEMS-101 (Sec. 102) Intro to
MEMS course (Instructor: Fabian Lopez), practiced
BOE etches on SiO2-coated wafers. (5 CNM students)
- CNM MEMS-101 (Sec. 103) Intro to
MEMS course (Instructor: Matthias Pleil), practiced
cleanroom safety and wafer fabrication. (9 CNM students)
- CNM MT-2097 (Sec. 102) offered as
substitute for MEMS-220; created pressure sensor arrays,
practiced cleanroom protocols and safety, learned
photolithography, plasma dry-etch, metallization for
the "lift-off" process, KOH bulk etch of
silicon, electrical testing, and piranha strip techniques.
(5 students)
Spring 2008
- UNM ECE-474/574
Microelectronics Processing course (Prof. Hersee);
created FET. (16 students)
- CNM SMT-2001 sec 101 Semiconductor
Fabrication course (Instructor: Fabian Lopez), fabricated
functional NMOS transistors, BOE etches of SiO2-coated
wafers, Aluminium deposition and etching of wafers,
electrical testing. (5 CNM students)
- Southwest
Indian Polytechnic Institute (SIPI), Manufacturing
Technology course (Instructors: Nader Vadiee and Manuel
Maese); Native American students created "art"
wafer during one 4 hour lab session at MTTC cleanroom.
(8 students)
- CNM Introduction to MEMS dual enrollment
high school students participated in cleanroom safety
and fabrication activities (14 students, Instructors:
Olga Vazquez, Albuquerque High School)
Summer 2008
- The
MTTC Cleanroom hosted a week-long SCME/MEMS
workshop for 2 UT-Brownsville students, and
4 APS high school faculty members, wherein they
created a wafer of pressure sensors (7-11 July
2008)
- The
SCME co-sponsored Introductory MEMS activities
at the MTTC for Native American Students participating
in the Southwestern Indian Polytechnic Institute
ROPE program as well as their ATEC summer program
for faculty from tribal colleges. (14 July to
11 August 08; 5 faculty, 3 students; made Art
Wafers)
- CNM Introduction to MEMS (MEMS1001)
students participated in cleanroom safety and
wafer processing activities. (11 students)
- CNM
MEMS Manufacturing Technology students (MEMS2015/2092)
students utilized the MTTC cleanroom learning
process characterization and advanced fabrication
skills. (4 students)
- Workshop and meetings held
for PED Online Nanoscience Course Development
grant contributors, Principal Investigator,
Dr. Matthias Pleill
Fall 2008
- The
MTTC was host to a Southwest Center for Microsystems
Education (SCME) week-long MEMS fabrication
workshop held November 10 through the 14th,
2008. Faculty from Austin Community College
(TX), North Dakota State College of Science
(ND) and Northwest Vista College (San Antonio,
TX) participated with 7 Northwest Vista College
students from their two-year Nanotechnology
Technician program. The students and faculty,
working side-by-side, each fabricated their
own wafer and successfully applied surface and
bulk micromachining fabrication principles,
to make a pressure sensor.
- The
SCME sponsored an Introduction to MEMS workshop
for 9 New Mexico middle and high school teachers
at the MTTC auditorium. Teachers were also given
a tour of the cleanroom facilities. (Instructor:
Dr. Matthias Pleil; 15 Nov 2008)
- CNM Introduction to MEMS (MEMS1001)
students participated in Cleanroom Safety and
Wafer processing activities. (14 students, Instructor
Dr. Matthias Pleil)
- CNM
Introduction to MEMS (MEMS1001) high school
dual enrollment students participated in Cleanroom
Safety and Wafer processing activities. (14
students, instructor high school teacher Olga
Vazquez)
- UNM ME-461E/561E, ECE-519
and NSMS-519 ST Theory, Fabrication, and Characterization
of Nano/Microelectromechanical Systems (NEMS/MEMS)
course (Prof. Leseman); created MEMS pressure
sensors and MEMS actuators. (27 students)
Spring 2009
- SCME sponsored Introduction
to Microsystems Workshop for teachers utilizing
the MTTC Auditorium and clean room facility
tour. (8 participants, Instructors: Fabian Lopez
and Dr. Matthias Pleil)
- SCME sponsored Microsystems
advanced topic workshop 5/30/2009
- CNM Introduction to MEMS (MEMS1001-21)
high school dual enrollment students participated
in cleanroom tour, safety and wafer processing
activities. (16 students from Socorro High School,
Instructor: Dr. Matthias Pleil)
- CNM Introduction to MEMS (MEMS1001-101)
participated in cleanroom tour, safety and wafer
processing activities. This course is part online
and part in class on Saturdays for hands-on
activities (13 students, Instructor: Dr. Matthias
Pleil)
- CNM Introduction to MEMS (MEMS1001-901)
high school dual enrollment students will participate
in cleanroom safety and wafer processing activities.
(9 students, Teacher: Albuquerque High School
Teacher Olga Vazquez)
- CNM MEMS Manufacturing Process
(MEMS2001-101) advanced fabrication methods,
students fabricate a micro pressure sensor utilizing
the MTTC cleanroom for all laboratory work.
Approximately 45hrs of cleanroom time. (7 students,
Instructor: Fabian Lopez)
- UNM ECE-474/574 Microelectronics
Processing course (Prof. Hersee); created FET.
(12 students)
- The MTTC Cleanroom hosted
a one-day MEMS workshop for 12 students from
Bernalillo High School (Instructors were: Abe
Gurule and Evelyn Eppinger - BHS; Fabian Lopez
- CNM (SCME Outreach), Harold Madsen - UNM).
The students made an "art wafer" (9
March 2009)
Summer 2009
- SCME sponsored
one-week pressure sensor workshop for secondary and
post secondary STEM educators. (~8 participants)
- SCME sponsored
one-week Introduction to Microsystems Rio Rancho High
School summer academy (~12 students + 1 or 2 RRHS
teachers, Instructor: Dr. Matthias Pleil)
Tours hosted by the MTTC Cleanroom
include:
- Albuquerque High School (CNM
Instructor Fabian Lopez; AHS Instructor Olga
Vasquez; 28 HS students)
- Santa Fe Indian School (CNM
Instructor Fabian Lopez; SFIS Instructor Smokey
Trujillo; 35 HS students)
- CNM ENGR-101 (CNM Instructor
Dr. Matt Pleil; 20 CC students)
- Santa Fe Indian School (SFIS
Instructor Smokey Trujillo; 11 HS students,
4/30/08, watched wafer processing)
- SIPI (12 college students,
and Dr. N. Vadiee, 3/27/09)
- Small Times (May/June 2007): “Community
Colleges are Critical”, by Staff, Vol. 7, No.
3, pg. 28.
The UNM MTTC Cleanroom Project gratefully
acknowledges support from the,
- State of New Mexico, for capital
and operating funds,
- University of New Mexico, for capital
funds,
- U.S. Department of Commerce, Economic
Development Administration (EDA), for capital funds,
- National Science Foundation, for
MRI funds (ECS-0521461),
- Next Generation Economy (NGE) industry
cluster, for equipment donations,
- Intel Corporation, for equipment
donations and operating funds,
- Philips Semiconductor, for equipment
donations,
- AT&T, for equipment donations.
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