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Course Descriptions

Note from the Director

The course descriptions presented herein are provided for convenience. However, they are subject to change. Students can consult with the instructor regarding the descriptions. Students should search and/or verify course availabilities and schedules by reviewing the UNM web link . For additional course descriptions, see the SCHOOL OF ENGINEERING within the UNM CATALOG.

ChNE 586 - Statistical Design of Experiments
for Semiconductor Manufacturing

This course consists of two self-contained modules. The first module covers each of the major integrated circuit processing methods, i.e., photolithography, etching, film growth and deposition, ion implantation, chemical mechanical polishing, and various support activities such as wafer cleaning. The second module covers the statistical tools for collection, analysis, and interpretation of data with emphasis on design and control of semiconductor processes. These include analysis of variance, Taguchi design, and utilization of RS/1 software. (3Hr)

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CS 492 - Computers in Manufacturing

This course is intended to provide an understanding and appreciation of the concepts, technology, and considerations associated with using computers in manufacturing facilities. To provide context, an overview of prototypical manufacturing operations and associated information and control needs are examined. Technical topics studied in detail are: digital computer systems, networks, distributed systems, software and hardware appraisal and selection, application development, data collection and analysis, and quality control. A team project is required and excellent laboratory facilities are available. A typical project includes an application program developed by a team that provides a user interface and high-level control. A network will connect the PC running the application program to a local real-time controller consisting of a microprocessor and associated sensors and actuators. A team will program the microprocessor. The local controller will in turn directly control a piece of moving equipment such as a train and/or a robot.

Instructor: Joel N. Beer, Ph.D., P.E., Adjunct Professor of Mechanical Engineering.
jnbeer@unm.edu or 505.272.7154

Text:
Instructor provided class notes.

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ECE 487 - Semiconductor Factory Design and Operation

Course provides a detailed overview of the operations and layout of an integrated circuit fabrication facility. Operations topics include basic wafer fabrication steps, tool selection, wafer tracking and handling, WIP, equipment and process integration, process ramp-ups, operator protocol, staffing, training, and best-practices. Fab (plant-level) design topics include costing, overall equipment effectiveness, construction materials, contamination control, air handling, and factory integration. Utility topics include ultrapure water, bulk and specialty gases, electricity minimization, waste stream design, recycling, and ESH requirements. Detailed tours of Sandia's Microelectronics Development Lab and discussions with fab engineers will be included in the course.

Instructor: Blewer and Weaver

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ECE 526 - Microelectronic Reliability

General: CMOS integrated circuit reliability is a complex subject and this course uses several experts from industry to provide depth and breadth of several areas listed below.
Prerequisites: basic knowledge of transistor devices (MOSFET) and CMOS IC technology. Students obtain this either through the university curriculums, industrial experience, or both.
Grading: mid-term, final exam and a term paper related to electronic failure analysis.
Text: There is no text covering all of the material. The material comes from PowerPoint notes from each lecturer loaded on a UNM web site.
Topic List: Microelectronic reliability failure mechanisms including:
• metal electromigration
• metal stress voiding
• oxide wearout
• oxide hot carrier injection
• IC packaging reliability
• qualification testing
• reliability statistics
• radiation effects
• EOS/ESD
• wafer level reliability
• new material reliability

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ECE 527 - Microelectronic Failure Analysis

This graduate course is a joint venture of the University of New Mexico (UNM), Sandia National Labs, and the Product Analysis Forum (PAF) of Sematech. The participating lecturers are from companies such as, AMD, Analytical Solutions, Ford/Visteon Microelectronics, Infineon, IBM, Intel, NIST, Sandia National Labs, Texas Instruments, and the University of New Mexico (UNM). The course was conceived to fill a void in university teaching of failure analysis and to allow experts from industry to participate in the course layout. The planning committee decides the best sequence of topics for the lectures and then invites persons from around the United States to give those lectures from the classroom in New Mexico.

Prerequisites: basic knowledge of transistor devices (MOSFET) and IC technology. Students obtain this either through the university curriculums, industrial experience, or both.
Grading: mid-term, final exam and a term paper related to electronic failure analysis.
Text: "Failure Analysis of Integrated Circuits - Tools and Techniques" by Lawrence C. Wagner, Kluwer Academic Pub, 1999.
Topic List includes:
• Failure Analysis (FA) Process and Decision-Making
• CMOS IC Electrical Testing and Characterization
• Package Analysis
• Depackaging, Including Backside Preparation
• ATE and Characterization of Failure Modes
• GFI (Global Fault Isolation)(: RCI, CIVA, LECIVA, EBIC, OBIC, LIVA, TIVA, SEI, Photoemission, Thermal
• Inspection Technology
• Diagnosis, Signature Analysis, SW failure isolation, Testability
• LFI (Local Fault Isolation): Electrical and Mechanical Probing, E-Beam, Laser Probing, Time-Resolved Photon Emission Analysis, High Resolution SPM
• Deprocessing
• Focused Ion Beam (FIB) Theory and Applications
• EOS/ESD Defects and Characterization
• SIMS, Micro-spot FTIR
• FA Lab Management
• Failure Analysis & Diagnosis Future: Needs, Challenges

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ECE 528 - Microelectronic Test Engineering

General: CMOS integrated circuit test engineering is possibly the most expensive component in the life cycle of an IC. This course uniquely teaches the interplay of the digital and mixed-signal automatic test equipment with the modern design-for-test concepts necessary to cost effectively achieve testability.
Prerequisites: basic knowledge of transistor devices (MOSFET) and CMOS IC technology. Students obtain this either through the university curriculums, industrial experience, or both.
Grading: mid-term, final exam, and a term paper related to electronic failure analysis.
Text (2): "Fundamentals of Digital Semiconductor Testing " by Guy Perry, Soft-Test Inc.
"Fundamentals of Mixed Signal Testing" by Soft-Test Inc
See web site for book purchase at http://www.soft-test.com
Topic List: Microelectronic test engineering topics are:
• test economics
• types of test
• AC/DC parametrics
• IDDQ testing
• memory testing
• ATE architecture
• faults and defects
• design for test
• Systems-on-Chip (SoC) testability
• board testing and IEEE standards
• mixed signal testing

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ECE 529 - Semiconductor Process Integration and Test

This course consists of two self-contained modules. The first module introduces methods for integrating individual semiconductor processes into a modern technology. Links between the processes and techniques for insuring compatibility are studied. The second module covers topics in testing, both devices and circuits. A major topic is parametric tests that study test structures and are carried out during fabrication. (3Hr)

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ECE 574L - Microelectronics Proc I

Materials science of semiconductors, microelectronics technologies, device/circuit fabrication, parasitics and packaging. Lab project features small group design/fabrication/testing of a simple MOS circuit.

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ECE 579 - Topics in Advanced Microelectronic Processing

Topics in Advanced Microelectronic Processing ECE 579-001 on M/W in ECE Bldg. Room 310, Spring

Instructor: Robert S. Blewer

COURSE OBJECTIVES:
(1) To give students a working knowledge about the most recent advances in the rapidly changing areas of advanced semiconductor fabrication technology.
(2) To qualify graduates to successfully compete for engineering positions in industry in multilevel interconnected and related technologies, which represent some of the most significant challenges in integrated circuit R&D and manufacturing today.

BACKGROUND:
IC processing advances are being driven at an amazing pace by industry competition for higher device performance. To meet increasingly demanding on-chip interconnect requirements, new materials and film deposition techniques are being introduced with each succeeding generation of devices. Low resistivity metals and ultra-low dielectric constant insulators are now being used to reduce signal delays in multilevel interconnect layers. Combinations of electrochemical deposited copper, sputtered aluminum, and chemical vapor deposited tungsten are required to meet geometrical, performance, yield, manufacturability and reliability requirements. To realize gigahertz microprocessor production, these and other advanced techniques will be required.

Through this course, an opportunity exists to learn about state of the art processing trends and how to apply these principles to excel in microelectronics processing.

Call 844-6125 for Topical Course Outline and Class Format information.

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ECE 595 - MEMS and Transducers
Development and Technology

The goals of this course is to introduce students to MEMS devices, microsystems and their applications. The course will start with an introduction on the mechanical and electrical properties of materials commonly used in MEMS. The micro-fabrication processes, including bulk and surface micromachining processes for realization of these micro/nano transducers will be discussed, along with integration of MEMS with CMOS electronics. Some representative sensors and actuators, including capacitive & piezoelectric pressure sensors, mechanical resonators and filters, minimally invasive implantable medical devices, and biomedical lab-on-a-chip will be used to illustrate the capabilities & advantages of these miniaturized devices. Smart microfluidic devices will be used to illustrate how MEMS technology provides a unique channel to cellular level treatment & diagnosis. This course includes a design project, using 2-layer polysilicon MUMP process to design a MEMS transducer of student's own choice. This course also includes a lab session for students to fabricate a multichannel drug delivery silicon probe using UNM’s MTTC cleanroom facility.

Prerequisites: Senior or graduate standing in Engineering or any Physical Science, or permission of the instructor.

Instructor: Professor Jingkuang Chen, jingchen@ece.unm.edu

Text: " Micromachined Transducers Sourcebook " by Gregory Kovacs.

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ME 456 - Entrepreneurial Engineering

The course is aimed at working engineers and scientists as well as graduate and undergraduate engineering students who wish to be better prepared to start successful new businesses if and when they may choose. Class members are invited to propose potential businesses, then divide into groups of about four each to develop business plans by the end of the semester. The class focuses upon marketing, finance, legal, manufacturing and management tools, resources and skills that increase the probability of successfully starting and growing a new company.

Instructor: Dr. Bill Gross

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ME 483/583 - Statistical Methods for Improving Product Quality

The purpose of this class will be to develop and illustrate statistical methods that can be used by people involved in areas where data are collected and analyzed in order to understand how processes operate. Such areas include business, engineering and science. The class will begin with an introduction to basic probability and statistical concepts. Common probability distributions and their characteristics and applications will be presented. Concepts of statistical tests of significance and confidence intervals will be presented. Probability theory will be presented by application to reliability analysis for parallel and series systems. This introduction will be followed by topics in acceptance sampling, statistical process control (SPC), process capability, concepts of design of experiments, comparative experiments, full factorial and fractional factorial experiments, and response surface methodology. Each of these topics will be illustrated with application to real world examples. The emphasis of this course will be on the effective and technically accurate implementation of the statistical techniques rather than their mathematical development. Statistical software will be used for the data analyses. The student will use any software they desire. The instructor will use JMP software which is available in the ME computer lab. There will be one exam and three projects assigned. Project #1 will be an individual project on statistical process control and process capability. It will be required that each student propose a SPC program for implementation for a specified manufacturing process. A report for technical management responsible for the process will be prepared. Project #2 will be a team project on design of experiments. The application of factorials experiments and response surface methodology will be the focus of the project. The purpose of this project will be design and analyze a series of experiments in order to determine the optimal operating conditions for the process. Project # 3, selected by the students, will be an application of statistical concepts to any area of the student’s interest.

Instructor: Dr. Richard Prairie.

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ME 487/587 - LEGO™ Robotics

Design and construction of an autonomous, microcomputer-controlled mobile robot using LEGO pieces and assorted electromechanical actuators and sensors. Students work in teams, and robots compete at the end of the semester. For more info, go to the ME LEGO Robotics Page .

Instructor: Dr. Greg Starr

Text:
Course notes provided by Instructor

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ME 488/588 - Design and Manufacturing in Industry

Course will consist of one three-hour site visit per week, to local companies and laboratories, to examine design and manufacturing techniques. Each site visit will consist of a one-hour tutorial about the company or lab and its manufacturing methods. The tutorial is to be followed by a two-hour tour through the facility. A term paper, and at least two classroom presentations by the student are expected. Occasionally, additional lectures will be provided on a scheduled basis. No exams. Enrollment limited (12). Senior or Graduate status required. Transportation not provided. Regular Class Meeting: Fridays, 1:00 - 3:50 pm, at company sites.

Instructor: Prof. J. Wood ME 206, phone: 505-277-1420,
fax: 505-277-7281, email: wood@me.unm.edu

Text:
J.R. Dixon and C. Poli, Engineering Design and Design for Manufacturing, 1995, Field Stone Publishers, Conway, MA (ISBN: 0-9645272-0-0).

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ME 547 - Principles of Precision Engineering

Lectures and laboratory projects emphasizing precision engineering in advanced manufacturing. We will address sub-micron, microinch, and nanometer resolution and repeatability; some of the applications for ultraprecision systems (emphasis on semiconductor lithography equipment) and the design of instruments to achieve accurate metrology and repeatable performance. Students will work in teams on a term project (drawn from industrial or academic research) to put into practice what they have learned in the course.

Instructor: TBD

Text: Ultraprecision Mechanism Design, Stuart Smith.

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ME 574 -Modeling, Simulation, & Synthesis of Electromechanical Control

Computer-aided simulation of dynamic systems and design of control systems. Design of actuators and sensors; linearization techniques; scaling. Performance criteria, robustness, state-space design. Synthesis through hardware implementation of an electromechanical control system.

Instructor: TBD

Text:
Art of Electronics, Horowitz & Hill.

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ME 584 - Computer Aided Design

Implementation of CAD/CAM in automated manufacturing systems, laboratory work on CAD solid modeling software.

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ME 585 - Modern Manufacturing Methods

First, a number of manufacturing approaches are explored including the concepts of "push" and "pull" manufacturing, just in time (JIT) manufacturing, Kanban, and continuous flow manufacturing. Then, assembly lines are modeled and analyzed. These lines are first modeled as reliable systems, then extended to the more realistic case where failures are taken into account. Other topics include: shop floor scheduling, flexible manufacturing systems, facility layout, material-handling systems, queuing, and warehousing. The concept of quality, shown in both Taguchi methods and the "house of quality" is also explored. The student will understand all of the terms in modern manufacturing and will be prepared to apply this knowledge to real problems. A term-project that ties these concepts together is required.

Instructor: Dr. Ron Lumia ME 319 272-7155 (office) email: lumia@me.unm.edu

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ME 586 - Design for Manufacturability

It has been claimed that 80% of the ultimate cost to produce a product is the direct result of the design. In this course, we will explore various techniques that make a product design manufacturable. Topics will include design as part of the manufacturing process, concurrent engineering, quality measures, manual and robotic assembly techniques, materials and processes, rules for design, life cycle and environmental concerns, and tools that help to analyze and measure designs quantitatively. A significant component of the course is the project, specified and executed by a student team.

Instructor: Dr. Ron Lumia ME 319 272-7155 (office) email: lumia@me.unm.edu

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ME 589 - Intelligent Controls in Manufacturing

This course emphasizes the state of the art in factory automation and computer integrated manufacturing (CIM) by focusing on software issues. Hierarchical control system architectures are explored along with automation applications for factories and robots. Case studies of existing automated facilities will be used to explore topics including: hierarchical control of factories, alternative control architectures, implementing open architecture controllers, off-line programming of equipment, planning for CIM, quality measurement, and production design systems. The final learning outcome of this course is that each student should have the ability to organize and implement the software that can control a machine, a grouping of machines as a workcell, or a grouping of workcells as a factory.

A term project, a substantial part of the course, will be assigned. The topic will relate to software architectures for manufacturing. The class will divide into teams to solve the problem. These teams should be formed strategically so that complementary skills are represented. Progress toward the successful completion of the project will be presented periodically in class, e.g., preliminary design review (PDR), critical design review (CDR), etc.

Instructor: Dr. Ron Lumia ME 319 272-7155 (office) email: lumia@me.unm.edu

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MGT-504 - Microeconomics for Managers

This is a course in microeconomics, which is the study of individual decision making in a world in which wants exceed available resources.

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MGT - 506. Organizational Behavior and Diversity

Intensive examination of behavioral science research and theory as a basis for understanding, managing and changing organizations. The course emphasizes effective management with diverse individuals.

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MGT 521 - Manufacturing Systems Management

An introduction to the principles and techniques necessary for the efficient design and operation of production and inventory planning, scheduling, and control systems. Topics include master planning, capacity management, inventory control, production activity control, JIT, MRP, and synchronous manufacturing.

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